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Rod-based Fabrication of Customizable Soft Robotic Pneumatic Gripper Devices for Delicate Tissue Manipulation

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A Two-Axis Piezoresistive Force Sensing Tool for Microgripping.

Bhawnath Tiwari¹, Margot Billot², Cédric Clévy¹

¹Department of Automatic Control and Micro-Mechatronic Systems, FEMTO-ST Institute, University Bourgogne Franche-Comté, CNRS, 24 rue Savary, F-25000 Besançon, France.

Sensors (Basel, Switzerland)

|September 28, 2021

Summary

This study presents a novel two-axis force sensing tool for microgrippers, enabling precise manipulation by measuring forces up to 9 mN with 20 μN resolution. The versatile design and microfabrication ensure accurate micro-scale force sensing.

Keywords:

design force sensing microgripper microrobotics multi-axis piezoresistive

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Last Updated: Oct 18, 2025

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Published on: August 2, 2016

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High-Speed Magnetic Tweezers for Nanomechanical Measurements on Force-Sensitive Elements

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Published on: May 12, 2023

Area of Science:

Micro-robotics and Manipulation
MEMS (Micro-Electro-Mechanical Systems)
Sensor Technology

Background:

Force sensing is crucial for micro-scale manipulation, where surface forces dominate.
Existing microgrippers often lack multi-axis force sensing, limiting their dexterity.
Coupled deformations at the micro-scale necessitate advanced sensing capabilities.

Purpose of the Study:

To develop and validate a versatile, two-axis force sensing tool for microgripping applications.
To address the complexities of single-wafer fabrication for micro-scale sensing and actuation.
To enable precise micro-manipulation tasks through integrated force feedback.

Main Methods:

Proposed a piezoresistive-based two-axis force sensing tool.
Investigated a versatile manufacturing strategy with separate fabrication of passive and sensing parts.
Utilized cleanroom microfabrication for device and electronics integration.
Performed Finite Element Method (FEM) analysis and experimental validation.

Main Results:

Achieved a sensing capability up to 9 mN along two axes with a resolution of 20 μN.
Experimental validation demonstrated a measurement error within 1%.
The fabricated sensing part is compatible with various passive gripper designs.

Conclusions:

The developed instrumented microgripper offers high-precision, multi-axis force sensing for micro-manipulation.
The versatile fabrication strategy allows for adaptable microgripper designs.
The system provides reliable force feedback for complex micrograsping and release tasks.