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Optimal Design of Piezoelectric Cantilevered Actuators for Charge-Based Self-Sensing Applications

Joël Bafumba Liseli1, Joël Agnus2, Philippe Lutz3

  • 1Department of Automatic Control and Micro-Mechatronic Systems, FEMTO-ST Institute, Université de Bourgogne Franche-Comté, CNRS, 24 rue Savary, F-25000 Besançon, France. jbafumba@femto-st.fr.

Sensors (Basel, Switzerland)
|June 9, 2019
PubMed

Keywords:
designmicro-/nano-robotsoptimizationpiezoelectric actuators and sensorsself-sensing actuation

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