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Atomic Force Microscopy

Atomic Force Microscopy

Atomic force microscopy (AFM) is a type of scanning probe microscopy that can analyze topographic details of various specimens like ceramics, glass, polymers, and biological samples. AFM offers over 1000 times more resolution than the optical imaging system. Images generated from AFM are three-dimensional surface profiles, offering an advantage over the flat, two-dimensional images from other imaging techniques.
The AFM Probe
The probe is regarded as the heart of any AFM setup and comprises the...

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Updated: Oct 18, 2025

Author Spotlight: Introduction to Active Probe Atomic Force Microscopy with Quattro-Parallel Cantilever Arrays

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Error Analysis of the Combined-Scan High-Speed Atomic Force Microscopy.

Lu Liu¹, Ming Kong¹, Sen Wu²

¹College of Metrology and Measurement Engineering, China Jiliang University, Hangzhou 310018, China.

Sensors (Basel, Switzerland)

|September 28, 2021

Summary

This summary is machine-generated.

High-speed atomic force microscopy (AFM) faces measurement errors due to scanner nonorthogonality and nonideal responses. Undesired Z-scanner motion significantly impacts accuracy, offering insights for instrument optimization.

Keywords:

Piezo Zemax atomic force microscopy combined-scan error analysis

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Area of Science:

Surface science
Nanotechnology
Microscopy

Background:

Atomic force microscopy (AFM) enables high-resolution surface imaging.
Combined tip-sample scanning architectures aim to increase AFM imaging speed.
Scanner nonorthogonality and nonideal responses introduce measurement errors in AFM.

Purpose of the Study:

To systematically analyze installation and response errors in combined scanning AFM architectures.
To identify the sources of measurement errors in high-speed AFM systems.
To provide optimization strategies for high-speed AFM instruments.

Main Methods:

Analysis of combined tip-sample scanning architecture.
Experimental investigation of scanner errors in a homemade high-speed AFM.
Comparison of experimental, numerical, and theoretical results.

Main Results:

Nonorthogonality and nonideal scanner responses cause measurement errors.
Probe movement with the Z-scanner leads to spot position changes on the detector.
Undesired Z-scanner motion, attributed to piezoelectric actuator behavior, introduces significant error.

Conclusions:

The Z-scanner's undesired motion is a major source of error in high-speed AFM.
Piezoelectric actuator behavior under multifield coupling contributes to these errors.
Findings offer directions for optimizing AFM instruments and designing future high-speed systems.