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Error Analysis of the Combined-Scan High-Speed Atomic Force Microscopy.
1College of Metrology and Measurement Engineering, China Jiliang University, Hangzhou 310018, China.
Sensors (Basel, Switzerland)
|September 28, 2021
Summary
High-speed atomic force microscopy (AFM) faces measurement errors due to scanner nonorthogonality and nonideal responses. Undesired Z-scanner motion significantly impacts accuracy, offering insights for instrument optimization.
Area of Science:
- Surface science
- Nanotechnology
- Microscopy
Background:
- Atomic force microscopy (AFM) enables high-resolution surface imaging.
- Combined tip-sample scanning architectures aim to increase AFM imaging speed.
- Scanner nonorthogonality and nonideal responses introduce measurement errors in AFM.
Purpose of the Study:
- To systematically analyze installation and response errors in combined scanning AFM architectures.
- To identify the sources of measurement errors in high-speed AFM systems.
- To provide optimization strategies for high-speed AFM instruments.
Main Methods:
- Analysis of combined tip-sample scanning architecture.
- Experimental investigation of scanner errors in a homemade high-speed AFM.
- Comparison of experimental, numerical, and theoretical results.
Main Results:
- Nonorthogonality and nonideal scanner responses cause measurement errors.
- Probe movement with the Z-scanner leads to spot position changes on the detector.
- Undesired Z-scanner motion, attributed to piezoelectric actuator behavior, introduces significant error.
Conclusions:
- The Z-scanner's undesired motion is a major source of error in high-speed AFM.
- Piezoelectric actuator behavior under multifield coupling contributes to these errors.
- Findings offer directions for optimizing AFM instruments and designing future high-speed systems.
