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Positioning Performance of a Sub-Arc-Second Micro-Drive Rotary System

Manzhi Yang1, Zhenyang Lv1, Chuanwei Zhang1

  • 1College of Mechanical Engineering, Xi'an University of Science and Technology, Xi'an 710054, China.

Micromachines
|September 28, 2021
PubMed

Keywords:
PZT (piezoelectric actuator)drive performancemicro rotary mechanismmicro-drive rotary systempositioning performancesub-arc-secondtransformation performance

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