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Nanometric displacement sensor with a switchable measuring range using a cylindrical vector beam excited silicon
Optics Express
|October 7, 2021
Summary
This study presents a silicon nanoantenna displacement sensor with switchable measuring ranges. It achieves 4.5 nm lateral resolution and offers tunable measurement capabilities for advanced optical applications.
Area of Science:
- Nanophotonics
- Optical Metrology
- Super-resolution Microscopy
Background:
- Silicon nanoantennas enable precise light-matter interactions.
- Tuning scattering properties is crucial for nanoscale sensing.
- Cylindrical vector beams offer unique polarization control.
Purpose of the Study:
- To demonstrate a nanometric displacement sensor using a single silicon nanoantenna.
- To achieve switchable measuring ranges for enhanced sensing flexibility.
- To explore the potential for super-resolution microscopy and optical nanometrology.
Main Methods:
- Utilizing a single silicon nanoantenna.
- Tuning longitudinal and transverse dipolar scattering interference.
- Employing cylindrical vector beams (azimuthally and radially polarized).
- Analyzing position-related scattering directivity.
Main Results:
- Achieved a lateral resolution of 4.5 nm for displacement sensing.
- Demonstrated switchable measuring ranges by altering beam polarization.
- Established a direct relationship between position and scattering directivity.
Conclusions:
- A facile method for tuning the measuring range of nanometric displacement sensors is presented.
- The developed sensor shows promise for super-resolution microscopy and optical nanometrology.
- Single nanoantenna-based sensors offer versatile displacement measurement capabilities.
