Multiple Linear Regression Modeling of Nanosphere Self-Assembly via Spin Coating

Talha Razaulla1, Michael Bekeris1, Haidong Feng1

  • 1Department of Mechanical Engineering, University of Utah, 1495 E 100 S, 1550 MEK, Salt Lake City, Utah 84112, United States.

Summary

Optimizing nanosphere spin coating is key for nanoscale patterning. This study uses design-of-experiments to find optimal parameters for defect-free nanosphere arrays, crucial for nanosphere lithography applications.

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