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High-Performance Waveguide-Integrated Bi2O2Se Photodetector for Si Photonic Integrated Circuits
Jianghong Wu1,2,3, Maoliang Wei1, Jianglong Mu4
1State Key Laboratory of Modern Optical Instrumentation, College of Information Science and Electronic Engineering, Zhejiang University, Hangzhou 310027, China.
ACS Nano
|October 15, 2021
Summary
Bismuth oxychalcogenide (Bi2O2Se) integrated onto silicon waveguides creates high-performance photodetectors. This advancement enables efficient light detection for spectroscopy, sensing, and communication applications.
Area of Science:
- Materials Science
- Photonics
- Electrical Engineering
Background:
- Low-dimensional materials are crucial for silicon photonic circuits due to their electrical and optical properties and integration flexibility.
- Bismuth oxychalcogenide (Bi2O2Se) shows promise for near-infrared photodetectors owing to its high carrier mobility, narrow bandgap, and stability.
Purpose of the Study:
- To develop and demonstrate a Bi2O2Se/Si waveguide integrated photodetector.
- To investigate the performance enhancement of the photodetector using a microring resonator.
Main Methods:
- Chemical vapor deposition (CVD) was used to grow Bi2O2Se on mica.
- A novel polycarbonate/polydimethylsiloxane-assisted transfer method was employed for clean and intact transfer onto silicon waveguides.
- A microring resonator was designed to enhance light-matter interaction.
Main Results:
- The integrated Bi2O2Se/Si photodetector exhibited a low dark current (72.9 nA), high responsivity (3.5 A·W⁻¹), and fast response times (22/78 ns) at 2V in the O-band.
- The microring resonator integration reduced dark current to 15.3 nA and increased responsivity over 3-fold at resonance.
- The device demonstrated excellent performance for transverse electric (TE) modes.
Conclusions:
- The successful integration of Bi2O2Se with silicon photonics platform is achieved.
- The developed photodetector shows potential for advanced applications in spectroscopy, sensing, and communication.
- Further development is expected to accelerate the use of integrated photodetectors.

