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Design and Characterization Methodology for Efficient Wide Range Tunable MEMS Filters

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A Systematic Design Optimization Approach for Multiphysics MEMS Devices Based on Combined Computer Experiments and

Shayaan Saghir¹, Muhammad Mubasher Saleem^1,2, Amir Hamza^1,2

¹Department of Mechatronics Engineering, National University of Sciences and Technology (NUST), Islamabad 44000, Pakistan.

Sensors (Basel, Switzerland)

|November 13, 2021

Summary

This summary is machine-generated.

This study introduces an efficient design method for two degree-of-freedom (2-DoF) capacitive microelectromechanical systems (MEMS) accelerometers. The approach optimizes multiple performance metrics simultaneously using Design and Analysis of Computer Experiments (DACE) and Gaussian Process (GP) modeling.

Keywords:

Gaussian process (GP)design and analysis of computer experiments (DACE)finite element method (FEM)microelectromechanical systems (MEMS)multiphysics optimization

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Area of Science:

Microelectromechanical Systems (MEMS)
Sensor Design
Computational Engineering

Background:

Capacitive MEMS accelerometers are crucial for various applications.
Optimizing their multiphysics performance presents significant design challenges.

Purpose of the Study:

To present a systematic and efficient design approach for 2-DoF capacitive MEMS accelerometers.
To simultaneously optimize multiple performance responses considering design, environmental, and fabrication constraints.

Main Methods:

Combined Design and Analysis of Computer Experiments (DACE) with Gaussian Process (GP) modeling.
Finite Element Method (FEM) simulations for multiphysics coupled field electro-thermal-structural analysis.
Gradient descent algorithm and desirability function approach for multi-objective optimization.

Main Results:

Developed accurate metamodels for individual output responses using GP analysis.
Successfully optimized natural frequency, displacement, pull-in voltage, capacitance change, and Brownian noise equivalent acceleration.
Validated optimization predictions using FEM simulations and integrated the optimized design with readout electronics.

Conclusions:

The combined DACE and GP-based methodology offers an efficient technique for design space exploration and optimization of multiphysics MEMS devices.
This approach aids in the early design phase of MEMS development cycles.