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Updated: Oct 13, 2025

Characterization of SiN Integrated Optical Phased Arrays on a Wafer-Scale Test Station
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High-performance lasers for fully integrated silicon nitride photonics.

Chao Xiang1, Joel Guo2, Warren Jin2

  • 1Department of Electrical and Computer Engineering, University of California, Santa Barbara, Santa Barbara, CA, USA. cxiang@ece.ucsb.edu.

Nature Communications
|November 18, 2021
PubMed
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High-performance silicon nitride (SiN) lasers achieve tens of milliwatts output power and sub-kHz linewidth. These lasers integrate seamlessly with SiN waveguides, advancing low-noise silicon nitride photonics for telecommunication applications.

Area of Science:

  • Photonics
  • Materials Science
  • Integrated Optics

Background:

  • Silicon nitride (SiN) waveguides are crucial for integrated photonics, offering ultra-low optical loss.
  • Integrating high-index III-V gain materials with low-index SiN waveguides for lasers has been challenging due to mode mismatch.
  • Previous heterogeneous integration enabled first-generation SiN lasers, but lacked high output power and yield at telecommunication wavelengths.

Purpose of the Study:

  • To develop high-performance lasers fully integrated with SiN waveguides.
  • To overcome limitations of large mode transition loss, non-optimized cavity design, and complex fabrication.
  • To achieve high output power and narrow linewidth lasers on SiN for telecommunication applications.

Main Methods:

  • Utilized multilayer heterogeneous integration techniques for laser fabrication on SiN.

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Last Updated: Oct 13, 2025

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  • Optimized cavity design and mode transition for efficient power delivery.
  • Developed advanced fabrication processes for high device yield.

    • Main Results:

    • Demonstrated SiN lasers with tens of milliwatts output power coupled to SiN waveguides.
    • Achieved sub-kHz fundamental linewidth for the integrated lasers.
    • Showcased potential for Hertz-level fundamental linewidth with developed integration techniques.

    Conclusions:

    • The developed lasers represent a significant advancement for fully integrated low-noise SiN photonics.
    • These high-performance lasers address key challenges in SiN photonic integrated circuits.
    • The technology holds promise for applications in LIDAR, microwave photonics, and coherent optical communications.