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Charging effect induced by electron beam irradiation: a review
1Department of Physics and Hefei National Laboratory for Physical Sciences at Microscale, University of Science and Technology of China, Hefei, People's Republic of China.
Science and Technology of Advanced Materials
|November 18, 2021
Summary
Charging effects hinder the analysis of nonconductive materials. This study reviews Monte Carlo simulations and experiments to understand and minimize these charging effects during electron beam irradiation.
Area of Science:
- Materials Science
- Physics
- Computational Modeling
Background:
- Electron beam characterization of nonconductive materials is often hindered by charging effects.
- These effects impede the acquisition of accurate material information.
- Experimental investigations alone are insufficient to fully understand charging phenomena.
Purpose of the Study:
- To provide a comprehensive overview of charging effects induced by electron beam irradiation.
- To elucidate the categories and theoretical underpinnings of charging effects.
- To discuss strategies for minimizing charging effects in material analysis.
Main Methods:
- Review of Monte Carlo simulations for modeling charging effects.
- Analysis of selected experimental data related to charging.
- Introduction to the theoretical framework for Monte Carlo modeling of charging.
Main Results:
- Categorization of charging effects in nonconductive materials.
- Presentation of typical simulation results illustrating charging phenomena.
- Insight into the mechanisms causing charging under electron beam irradiation.
Conclusions:
- Monte Carlo simulations are a valuable tool for theoretical investigation of charging effects.
- Understanding charging mechanisms is crucial for accurate material characterization.
- Knowledge of charging effects aids in developing effective mitigation strategies.
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