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The photoelectron x-ray microscope, a possible tool for analytical soft x-ray microscopy
1LURE, Université de Paris XI, Orsay, France.
Scanning Microscopy. Supplement
|January 1, 1987
Summary
New soft x-ray microscopy techniques offer intermediate resolution imaging for biological samples with minimal preparation. This photoelectron X-ray microscope enables absorption microanalysis and element mapping at 0.1-micron resolution.
Area of Science:
- Biophysics
- Microscopy
- Materials Science
Background:
- Soft X-ray microscopy provides intermediate resolution imaging between optical and electron microscopy.
- Minimal sample preparation is needed due to contrast dependent on chemical composition and X-ray wavelength.
Purpose of the Study:
- To develop and characterize a photoelectron X-ray microscope for absorption microanalysis.
- To extend X-ray microscopy capabilities to a wide range of wavelengths for enhanced analysis.
Main Methods:
- Utilizing a photoelectron X-ray microscope that converts X-ray images into secondary electron images.
- Magnifying the secondary electron image using an emission electron microscope.
- Operating the microscope across a broad spectrum of X-ray wavelengths.
Main Results:
- Achieving 0.1-micron resolution for element maps.
- Demonstrating the potential for absorption microanalysis with the developed microscope.
- Establishing a detection limit of approximately 1% concentration for elemental mapping.
Conclusions:
- The developed photoelectron X-ray microscope is suitable for absorption microanalysis.
- This technique offers high-resolution elemental mapping with minimal sample preparation.
- The system's broad wavelength range enhances its analytical capabilities for biological and material samples.