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Design and Characterization Methodology for Efficient Wide Range Tunable MEMS Filters
Published on: February 4, 2018
Jan van den Broek1, Ines C Weber, Andreas T Güntner
1Particle Technology Laboratory, Institute of Energy & Process Engineering, Department of Mechanical and Process Engineering, ETH Zurich, CH-8092 Zurich, Switzerland. sotiris.pratsinis@ptl.mavt.ethz.ch.
Material engineering of filters enhances gas sensor selectivity for complex mixtures. This review details designing sorption, size-selective, and catalytic filters for portable, low-cost sensing applications.
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