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Fabrication of Planar Microelectrode Array Using Laser-Patterned ITO and SU-8.

Hee Soo Jeong1,2, Seoyoung Hwang1, Kyou Sik Min3

  • 1Department of Electronic and Electrical Engineering, Ewha Womans University, Seoul 03760, Korea.

Micromachines
|November 27, 2021
PubMed
Summary

This study presents a cost-effective fabrication method for microelectrode arrays (MEAs) using laser-patterned indium tin oxide and SU-8 insulation. The new method offers similar performance to conventional techniques for neural recording.

Keywords:
SU-8iridium oxidelasermicroelectrode arrayphotolithography

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Area of Science:

  • Neuroscience
  • Materials Science
  • Bioengineering

Background:

  • Microelectrode arrays (MEAs) are crucial for in vitro neural electrophysiology, enabling monitoring of neuronal activity.
  • Conventional MEA fabrication involves complex microfabrication steps, driving the need for simpler, customizable methods.

Purpose of the Study:

  • To develop a simplified and cost-effective fabrication process for microelectrode arrays (MEAs).
  • To evaluate the performance and biocompatibility of MEAs fabricated using laser-patterned indium tin oxide (ITO) and SU-8 photoresist.

Main Methods:

  • Fabrication of MEAs using laser-patterning of ITO for conductors and SU-8 for insulation.
  • Electroplating electrode sites with iridium oxide (IrOX) to enhance electrochemical properties.
  • Electrochemical characterization, insulation stability testing, and neural recording with cultured rat hippocampal neurons.

Main Results:

  • The proposed method simplifies MEA fabrication by using laser ablation for ITO patterning and SU-8 photolithography for insulation.
  • The fabricated MEAs demonstrated stable insulation for three weeks and comparable electrochemical and electrophysiological performance to conventional MEAs.
  • Biocompatibility was confirmed through successful culturing and extracellular neural recording of dissociated rat hippocampal neurons.

Conclusions:

  • The laser-patterned ITO and SU-8 insulated MEAs offer a cost-effective and feasible alternative to conventional fabrication methods.
  • This simplified approach facilitates customization and broadens the application of MEAs in neural electrophysiology.