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Ultrahigh Sensitivity of a Plasmonic Pressure Sensor with a Compact Size
Chung-Ting Chou Chao1, Yuan-Fong Chou Chau2, Sy-Hann Chen3
1Department of Optoelectronics and Materials Technology, National Taiwan Ocean University, Keelung 20224, Taiwan.
Nanomaterials (Basel, Switzerland)
|November 27, 2021
Summary
This study introduces a novel plasmonic pressure sensor with ultrahigh sensitivity. The compact metal-insulator-metal device demonstrates a significant wavelength shift under pressure, outperforming existing technologies.
Area of Science:
- Plasmonics
- Nanophotonics
- Optical Sensors
Background:
- Plasmonic sensors offer high sensitivity for various applications.
- Metal-insulator-metal (MIM) structures are key components in plasmonic devices.
- Pressure sensing requires highly sensitive and compact devices.
Purpose of the Study:
- To propose a compact plasmonic metal-insulator-metal (MIM) pressure sensor.
- To investigate the sensor's performance using finite element method (FEM).
- To achieve ultrahigh sensitivity and significant resonance wavelength shift for pressure detection.
Main Methods:
- Utilizing a bus waveguide and resonator structure with slots and stubs.
- Calculating transmittance spectrum and electromagnetic field distribution via FEM.
- Analyzing the relationship between applied pressure and resonance wavelength shift.
Main Results:
- Demonstrated a nearly linear relationship between resonator deformation and resonance wavelength redshift.
- Achieved maximum sensitivity of 592.44 nm/MPa, a 23.32-fold improvement over literature.
- Observed a maximum resonance wavelength shift of 364 nm.
- The sensor exhibits multiple modes and a simple structure.
Conclusions:
- The designed plasmonic MIM pressure sensor offers unprecedented sensitivity.
- The device's performance paves the way for advanced nanophotonic applications.
- This work sets a new benchmark for plasmonic pressure sensing.
