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The Design of a Reflection Electron Energy Loss Spectrometer Attachment for Low Voltage Scanning Electron Microscopy
Jonathan Chuah1, Anjam Khursheed1
1Department of Electrical and Computer Engineering, National University of Singapore, Singapore 117583, Singapore.
Materials (Basel, Switzerland)
|December 24, 2021
Summary
A new reflection electron energy spectrometer (REELS) attachment for low voltage scanning electron microscopy (LVSEM) has been designed. This compact device offers nanoscale spatially resolved REELS analysis for advanced microscopy applications.
Area of Science:
- Materials Science
- Analytical Chemistry
- Physics
Background:
- Low voltage scanning electron microscopy (LVSEM) is crucial for nanoscale imaging.
- Acquiring spatially resolved spectroscopic information in LVSEM remains challenging.
- Reflection Electron Energy Loss Spectroscopy (REELS) provides valuable chemical and electronic information.
Purpose of the Study:
- To design a compact REELS attachment for LVSEM.
- To enable nanoscale spatially resolved REELS analysis.
- To achieve high energy resolution for backscattered electrons.
Main Methods:
- Scattered electron trajectory ray path simulations were performed.
- A retarding field electrostatic toroidal sector energy analyzer was designed.
- Ray-tracing simulations predicted performance for 1 keV backscattered electrons.
Main Results:
- The designed spectrometer is compact, fitting on an SEM specimen stage.
- Simulations predict an energy resolution of ~0.4 eV at 10 eV pass energy.
- Simulations predict an energy resolution of ~0.2 eV at 5 eV pass energy.
Conclusions:
- The designed REELS attachment is suitable for LVSEM applications.
- The device enables nanoscale spatially resolved REELS.
- It is compatible with SEMs utilizing field emission electron sources.
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