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Optimal deformation procedure for hybrid adaptive x-ray mirror based on mechanical and piezo-driven bending system

Takato Inoue1, Yuka Nishioka1, Satoshi Matsuyama1

  • 1Department of Precision Science and Technology, Graduate School of Engineering, Osaka University, 2-1 Yamada-oka, Suita, Osaka 565-0871, Japan.

The Review of Scientific Instruments
|January 1, 2022
PubMed

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