A compact extreme ultraviolet high-throughput spectrometer based on the multilayer varied-line-spacing grating

In this paper, we propose a compact extreme ultraviolet high-throughput spectrometer covering the 50-70 eV energy band. The key element in this spectrometer is a multilayer varied-line-spacing grating that operates in near-normal incidence geometry. The spectrometer can obtain one order of magnitude higher throughput compared to the traditional grazing incidence grating spectrometer in this energy band. The spectrum collection time and sample radiation damage can be largely reduced using the presented design.