Ultra-Thin Chips With ISFET Array for Continuous Monitoring of Body Fluids Ph

This paper presents ISFET array based pH-sensing system-on-ultra-thin-chip (SoUTC) designed and fabricated in 350 nm CMOS technology. The SoUTC with the proposed current-mode active-pixel ISFET circuit array is desined to operate at 2 V and consumes 6.28 μW per-pixel. The presented SoUTC exhibits low sensitivity to process, voltage, temperature and strain-induced (PVTS) variations. The silicon area occupancy of each active-pixel is 44.9 × 33.5 µm² with an ion-sensing area of 576 µm². The design of presented ISFET device is analysed with finite element modeling in COMSOL Multiphysics using compact model parameters of MOSFET in 350 nm CMOS technology. Owing to thin (∼30 µm) Si-substrate the presented SoUTC can conform to curvilinear surfaces, allowing intimate contact necessary for reliable data for monitoring of analytes in body fluids such as sweat. Further, it can operate either in a rolling shutter fashion or in a pseudo-random pixel selection mode allowing the simultaneous detection of pH from different skin regions. Finally, the circuits have been tested in aqueous Dulbecco's Modified Eagle Medium (DMEM) culture media with 5-9 pH values, which mimics cellular environments, to demonstrate their potential use for continuous monitoring of body-fluids pH.