Effects of the coherence of illumination on electron microdiffraction pattern intensities

Microdiffraction is capable of revealing the local structure within an area of the specimen consisting of only a few, or a few tens of, unit cells. However, the extent to which the diffraction pattern intensities can show the local structure depends strongly on the coherence of the illumination. If the coherence width of the illumination is smaller than the diameter of the electron probe at the specimen level, the details within the diffraction spots, which indicate deviations of the local structure from the periodicity of the crystal, will be lost. The differences in the amount of spot splitting observed in microdiffraction patterns from out-of-phase domain boundaries, observed with two instruments, are attributed to differences in the effective source sizes.