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Updated: Oct 6, 2025

Fabrication of 3D Carbon Microelectromechanical Systems C-MEMS
Published on: June 17, 2017
Joon Hyong Cho1, David Cayll1, Dipankar Behera1
1Department of Mechanical Engineering, The University of Texas at Austin, 204 E Dean Keeton St, Austin, TX 78712, USA.
Manufacturing scalable graphene devices for Micro-Nano Electromechanical Systems (MEMS/NEMS) faces challenges. This review explores graphene integration, mass production, and solutions for commercialization barriers.
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