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Calibration Method of Accelerometer Based on Rotation Principle Using Double Turntable Centrifuge
Xianshan Dong1, Xinlong Huang1,2, Guizhen Du1,3
1Science and Technology on Reliability Physics and Application of Electronic Component Laboratory, No. 5 Electronics Research Institute of the Ministry of Industry and Information Technology, Guangzhou 511370, China.
This study introduces a novel double turntable centrifuge method to accurately calibrate linear accelerometers by correcting installation errors. The technique ensures precise input acceleration measurement, simplifying calibration and improving accuracy for devices like MEMS accelerometers.
Area of Science:
- Metrology and Instrumentation
- Sensor Technology
- Mechanical Engineering
Background:
- Centrifuge calibration is crucial for linear accelerometers, but sample installation errors lead to inaccuracies.
- Accurate determination of input acceleration is essential for reliable accelerometer calibration.
Purpose of the Study:
- To propose a new calibration method for linear accelerometers that addresses and corrects installation errors.
- To enable accurate measurement of input acceleration in accelerometer calibration using a double turntable centrifuge.
Main Methods:
- A double turntable centrifuge was employed, utilizing a rotation principle to align the accelerometer's input axis perpendicular to the centripetal acceleration vector.
- Models for angular and radial installation errors were developed to facilitate accurate static radius and input acceleration determination.
- The method was applied to calibrate MEMS accelerometers with a range of ±30 g.
Main Results:
- The proposed method successfully eliminated installation errors, leading to discrepancies smaller than 100 ppm across different installation positions.
- Calibration of scale factor, nonlinearity, and asymmetry was effectively implemented.
- Results obtained were consistent with the back-calculation method, confirming the technique's validity.
Conclusions:
- The developed double turntable centrifuge method accurately measures static radius and input acceleration, directly compensating for installation errors.
- This approach simplifies the accelerometer calibration procedure and enhances measurement precision.
- The method is effective for calibrating various linear accelerometers, including MEMS devices.
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