Nanoscale tip positioning with a multi-tip scanning tunneling microscope using topography images

Multi-tip scanning tunneling microscopy (STM) is a powerful method to perform charge transport measurements at the nanoscale. With four STM tips positioned on the surface of a sample, four-point resistance measurements can be performed in dedicated geometric configurations. Here, we present an alternative to the most often used scanning electron microscope imaging to infer the corresponding tip positions. After the initial coarse positioning is monitored by an optical microscope, STM scanning itself is used to determine the inter-tip distances. A large STM overview scan serves as a reference map. Recognition of the same topographic features in the reference map and in small scale images with the individual tips allows us to identify the tip positions with an accuracy of about 20 nm for a typical tip spacing of ∼1μm. In order to correct for effects such as the non-linearity of the deflection, creep, and hysteresis of the piezoelectric elements of the STM, a careful calibration has to be performed.