A Semisolid Micromechanical Beam Steering System Based on Micrometa-Lens Arrays

Optical beam steerers have been widely employed for information acquisitions. Numerous beam steering schemes have been developed, and each of them can satisfy practical requirements for certain scenarios. However, there is still a lack of a comprehensive approach that is able to balance all of the critical technical parameters for wide range of applications. Here, a semisolid micromechanical beam steering system based on micrometa-lens arrays (MMLAs) is demonstrated. It is operated by manipulating the probe beam over two sets of decentered MMLAs potentially driven by high-speed piezo-electric motors. Small f-numbers, well-corrected aberration, and easy lateral reproduction of micrometa-lenses optimize the overall technical parameters. As a proof-of-concept, we implement such a device exhibiting diffraction-limited resolution within a large field of view of 30° × 30°. A three-dimensional depth sensing is also performed to demonstrate its potential in light detection and ranging applications.