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Published on: November 1, 2013
The Effect of Gate Work Function and Electrode Gap on Wide Band-Gap Sn-Doped α-Ga2O3 Metal-Semiconductor Field-Effect
Han-Sol Ro1, Sung Ho Kang2, Sungyeop Jung1
1Semiconductor Devices and Circuits Laboratory, Advanced Institute of Convergence Technology, Seoul National University, Suwon 16229, Korea.
Abstract:
We present technology computer aided design (TCAD) results for wide band-gap Sn-doped α-Ga2O3 metal-semiconductor field-effect transistors (MESFETs). In particular, the effect of gate work function and electrode gap length on the electrical characteristics is demonstrated for a thorough understanding of the behavior of such devices. The gate work function significantly affects the reverse bias drain current under the gate-current dominant regime, whereas a gate-source/drain gap larger than 0.1 µm has a negligible effect on the drain current.
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