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Updated: Oct 3, 2025

Fabrication of Surface Acoustic Wave Devices on Lithium Niobate
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Surface Acoustic Wave (SAW) Sensors: Physics, Materials, and Applications

Debdyuti Mandal1, Sourav Banerjee1

  • 1Integrated Material Assessment and Predictive Simulation Laboratory, University of South Carolina, Columbia, SC 29208, USA.

Sensors (Basel, Switzerland)
|February 15, 2022
PubMed

Keywords:
AlNGaAsGaNIDTLamb waveLove waveMEMSRayleigh waveSAW devicesSAW waveSH-waveZnObiosensorschemical sensorscrystal cutinterdigitated electrodeslithium niobatelithium tantalatepoint-of-care (POC)surface acoustic waves (SAW)

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