Capacitive Sensor and Alternating Drive Mixing for Microfluidic Applications Using Micro Diaphragm Pumps

Thomas Thalhofer1,2, Mauro Keck1,2, Sebastian Kibler1

  • 1Fraunhofer EMFT Research Institution for Microsystems and Solid State Technologies, Hansastrasse 27d, 80686 Munich, Germany.

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