Using a Tip Characterizer to Investigate Microprobe Silicon Tip Geometry Variation in Roughness Measurements

Area of Science:

• Metrology and Surface Science
• Nanotechnology and MEMS

Background:

• Microprobes offer high-speed roughness measurement capabilities.
• Tip geometry variation and volume loss during measurement increase uncertainty.

Purpose of the Study:

• Investigate factors influencing microprobe tip geometry variation.
• Identify the primary cause of tip volume loss in microprobe roughness measurements.

Main Methods:

• Utilized a rectangular-shaped tip characterizer to analyze tip geometry.
• Developed a method for reconstructing tip geometry from measured profiles.
• Conducted experiments varying tip wear, probing force, and tip-sample relative movement.

Main Results:

• Tip fracture, not tip wear, is the dominant cause of tip volume loss.
• Lateral dynamic loads during scanning significantly contribute to tip fracture.
• Tip geometry variation is influenced by wear, probing force, and scanning dynamics.

Conclusions:

• Understanding tip fracture mechanisms is crucial for improving microprobe measurement accuracy.
• Mitigating lateral dynamic loads can enhance the longevity and reliability of microprobe tips.
• Further research should focus on strategies to minimize tip fracture for high-speed roughness metrology.