Enhanced sensing performance from trapezoidal metallic gratings fabricated by laser interference lithography

Nanograting-based plasmonic sensors are widely regarded as promising platforms due to their real-time label-free detection and ease of integration. However, many reported grating structures are too complicated to fabricate, which limits their application. We propose a 1D bilayer metallic grating with trapezoidal profile as a near-infrared plasmonic sensor in the spectral interrogation. Trapezoidal gratings tend to perform better than rectangular gratings as sensors, particularly as they can detect at oblique incidence to obtain higher performance. Furthermore, we have successfully fabricated such a grating with a period of 633 nm over a 2.25 cm² area using a two-step approach based on laser interference lithography. Glucose detection has been conducted to experimentally validate the sensing performance of the as-prepared grating. The measured sensitivity and figure-of-merit can reach up to 786 nm/RIU and 30, respectively. Our research sheds new light on the development of cost-effective sensing devices.