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Optical microscopy uses optic principles to provide detailed images of samples. Antonie van Leeuwenhoek designed the first compound optical microscope in the 17th century to visualize blood cells, bacteria, and yeast cells. In 1830, Joseph Jackson Lister created an essentially modern light microscope. The 20th century saw the development of microscopes with enhanced magnification and resolution.
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Deep learning in optical metrology: a review.

Chao Zuo1,2, Jiaming Qian3,4, Shijie Feng3,4

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Deep learning is revolutionizing optical metrology with data-driven solutions for tasks like fringe denoising and phase retrieval. This approach offers improved performance over traditional physics-based methods in various applications.

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Area of Science:

  • Optical metrology
  • Machine learning
  • Deep learning

Background:

  • Optical metrology is crucial for quality control, nondestructive testing, and biomedicine.
  • Deep learning, a subset of machine learning, excels at solving complex problems using data.
  • The integration of deep learning into optical metrology is rapidly advancing.

Purpose of the Study:

  • To provide an overview of deep learning in optical metrology.
  • To review the latest advancements and applications of deep learning technologies.
  • To discuss challenges and future research directions.

Main Methods:

  • Review of traditional image processing in optical metrology.
  • Introduction to fundamental deep learning concepts.
  • Comprehensive analysis of deep learning applications in optical metrology tasks.

Main Results:

  • Deep learning offers data-driven alternatives to physics-based methods.
  • Successful applications include fringe denoising, phase retrieval, and error compensation.
  • Deep learning demonstrates superior performance in various optical metrology tasks.

Conclusions:

  • Deep learning is a powerful tool transforming optical metrology.
  • Further research is needed to address current challenges.
  • Future directions include advancing deep learning methodologies for optical metrology.