Speed enhancement of dynamic spectroscopic ellipsometry by using direct spectral phase extraction method

Area of Science:

• Spectroscopic ellipsometry
• Optical metrology
• Materials characterization

Background:

• Dynamic spectroscopic ellipsometry (DSE) is crucial for real-time material analysis.
• Current DSE methods often face computational bottlenecks, limiting their speed and applicability.
• Accurate and rapid extraction of ellipsometric parameters is essential for dynamic processes.

Purpose of the Study:

• To introduce a novel direct spectroscopic ellipsometric parameter extraction algorithm.
• To enhance the computational speed of dynamic spectroscopic ellipsometry.
• To evaluate the accuracy and benefits of the proposed direct method compared to existing techniques.

Main Methods:

• Development of a direct spectral phase calculation algorithm.
• Comparison of the direct method's speed and accuracy against Fourier transform-based approaches.
• Analysis of the enlarged spectral range and precision optimization capabilities.

Main Results:

• The proposed direct method offers faster spectral phase extraction than Fourier transform methods.
• The accuracy of the direct method is comparable to that of Fourier transform methods.
• The algorithm demonstrates potential for enlarged measurement spectral range and precision optimization.

Conclusions:

• The developed direct spectroscopic ellipsometric parameter extraction algorithm significantly enhances computational speed for DSE.
• This method provides a viable alternative to Fourier transform techniques, maintaining high accuracy.
• The algorithm presents opportunities for improved precision and broader spectral range in ellipsometric measurements.