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Integration of Multifocal Microlens Array on Silicon Microcantilever via Femtosecond-Laser-Assisted Etching
Bao-Xu Wang1, Jia-Xin Zheng1, Jin-Yong Qi1
1State Key Laboratory of Integrated Optoelectronics, College of Electronic Science and Engineering, Jilin University, Changchun 130012, China.
Micromachines
|February 25, 2022
Summary
Femtosecond laser-assisted dry etching enables fabrication of silicon microlenses for micro-opto-electromechanical systems (MOEMSs). This technique allows controlled size adjustment and integration into microcantilevers for advanced 3D imaging applications.
Area of Science:
- Optics and Photonics
- Microfabrication Technologies
- Materials Science
Background:
- Micro-opto-electromechanical systems (MOEMSs) are crucial for miniaturized optical systems but face challenges in integrating complex micro-optical elements.
- Existing methods struggle with the precise fabrication and integration of micro-optical components with micro-electromechanical systems.
Purpose of the Study:
- To develop a novel femtosecond-laser-assisted dry etching technology for fabricating silicon microlenses.
- To demonstrate the controlled fabrication of microlens size and integration into microcantilevers.
- To expand the application scope of MOEMSs in advanced optical systems.
Main Methods:
- Utilized femtosecond laser-assisted dry etching for silicon microlens fabrication.
- Controlled microlens dimensions through laser pulse energy and pulse count.
- Integrated multifocal microlens arrays with specific focal lengths (7-9 μm) onto silicon microcantilevers.
Main Results:
- Successfully fabricated silicon microlenses with controllable sizes using the proposed method.
- Demonstrated the integration of multifocal microlens arrays onto silicon microcantilevers.
- Verified the feasibility of the technology for creating complex micro-optical elements.
Conclusions:
- Femtosecond laser-assisted dry etching offers a viable technique for fabricating silicon microlenses.
- The developed method facilitates the integration of micro-optical elements into MOEMS platforms.
- This technology holds promise for advancing MOEMS applications, particularly in 3D imaging systems.
