Thermal Conductivity Gas Sensor with Enhanced Flow-Rate Independence.

Jiayu Wang1,2, Yanxiang Liu1, Hong Zhou1

  • 1Science and Technology on Microsystem Laboratory, Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences, Shanghai 200050, China.

Summary

Novel thermal gas sensors with unique diffusion channels significantly reduce flow-rate disturbances. These new designs improve gas detection accuracy by minimizing flow velocity near the sensor

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