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Using Micro-Electro-Mechanical Systems MEMS to Develop Diagnostic Tools
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MEMS Underwater Directional Acoustic Sensor in Near Neutral Buoyancy Configuration.

Fabio Alves1, Jaehyun Park1, Leland McCarty1

  • 1Naval Postgraduate School, Monterey, CA 93943, USA.

Sensors (Basel, Switzerland)
|February 26, 2022
PubMed
Summary

This study demonstrates a novel Micro-Electro-Mechanical Systems (MEMS) directional acoustic sensor for underwater use. The buoyant sensor achieves a cosine directional response, crucial for underwater acoustic monitoring.

Keywords:
MEMS acoustic sensordirectional acoustic sensorneutral buoyancyunderwater

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Area of Science:

  • Acoustic Engineering
  • MEMS Technology
  • Underwater Sensing

Background:

  • Directional acoustic sensors are vital for underwater acoustic monitoring and signal processing.
  • Existing sensors often face challenges with buoyancy and directional accuracy in underwater environments.

Purpose of the Study:

  • To demonstrate a Micro-Electro-Mechanical Systems (MEMS) directional acoustic sensor capable of operating underwater in a near-neutral buoyancy configuration.
  • To evaluate the sensor's directional response and sensitivity in both air and underwater conditions.

Main Methods:

  • Fabrication of a MEMS sensor with a specific wing-bridge-torsional leg structure housed in an air cavity.
  • Testing the sensor's frequency response, directional sensitivity, and signal-to-noise ratio (SNR) using a shaker table in air and underwater.
  • Analysis of resonant modes (rocking and bending) and their impact on sensor performance.

Main Results:

  • The MEMS sensor exhibited two resonant peaks: a rocking mode and a bending mode.
  • In air, maximum sensitivity was 95 mV/Pa; underwater, it was 37 mV/Pa, both with a cosine directional response.
  • A maximum SNR of approximately 38 dB was achieved underwater near the bending resonance.

Conclusions:

  • The demonstrated MEMS sensor is suitable for near-neutral buoyant underwater operation.
  • The sensor provides a good directional response, essential for distinguishing sound sources in underwater acoustic applications.
  • This technology offers a promising solution for enhanced underwater acoustic sensing capabilities.