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Updated: Oct 2, 2025

Using Synchrotron Radiation Microtomography to Investigate Multi-scale Three-dimensional Microelectronic Packages
Published on: April 13, 2016
A synchrotron-based kilowatt-level radiation source for EUV lithography
Bocheng Jiang1,2, Chao Feng3,4, Changliang Li1
1Shanghai Advanced Research Institute, Chinese Academy of Sciences, Shanghai, 201204, China.
Abstract:
A compact damping ring with a limited circumference of about 160 m is proposed for producing kilowatt-level coherent EUV radiation. The electron bunch in the storage ring is modulated by a 257 nm wavelength seed laser with the help of the angular-dispersion-induced micro-bunching method (Feng and Zhao in Sci Rep 7:4724, 2017), coherent radiation at 13.5 nm with an average power of about 2.5 kW can be achieved with the state-of-the-art accelerator and laser technologies.
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