Design and study of an integral valve piezoelectric pump with a novel working mode

In this paper, an integral valve is proposed by connecting the inlet cantilever valve and the outlet cantilever valve with a connecting post and a rubber circle plate structure. The integral valve changes the traditional inlet cantilever valve and outlet cantilever valve to work independently and realizes the joint response of the inlet cantilever valve and the outlet cantilever valve. The integral valve was designed, manufactured, and installed, and the performance of the static experimental test equipment of the valve and that of the experimental equipment of the piezoelectric pump were evaluated. The static performance of the integral valve was tested. In addition, the performance of the integral valve piezoelectric pump and the cantilever valve piezoelectric pump was tested and compared. The experimental results show that the integral valve piezoelectric pump reaches up to 270.2 ml/min at 210 Vrms, 45 Hz; the pressure can reach 86.2 cmH₂O at 40 Hz. Compared to cantilever valves, integral valves have less forward flow resistance and better reverse shutoff. In particular, the pressure of the integral valve piezoelectric pump can be significantly improved compared to the cantilever valve piezoelectric pump. In terms of efficiency, the integrated valve piezoelectric pump will have better performance in the low-frequency region.