AFM Characterization of Temperature Effect on the SU-8 Mechanical and Tribological Properties

Marius Pustan1, Corina Birleanu2, Rodica Voicu2

  • 1Micro & Nano Systems Laboratory, Department of Mechanical Systems Engineering, Technical University of Cluj-Napoca, 103-105 Muncii Street, 400641 Cluj-Napoca, Romania.

Polymers
|March 10, 2022
PubMed