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Boxcar Averaging Scanning Nonlinear Dielectric Microscopy.

Kohei Yamasue1, Yasuo Cho1

  • 1Research Institute of Electrical Communication, Tohoku University, 2-1-1 Katahira, Aoba, Sendai 980-8577, Japan.

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Summary

Scanning nonlinear dielectric microscopy (SNDM) with intermittent contact atomic force microscopy (AFM) now has an improved signal-to-noise ratio using boxcar averaging. This advancement enables clearer imaging of delicate semiconductor materials at the nanoscale.

Keywords:
boxcar averagingscanning microwave impedance microscopyscanning near-field microwave microscopyscanning nonlinear dielectric microscopyscanning probe microscopy

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Area of Science:

  • Materials Science
  • Physics
  • Electrical Engineering

Background:

  • Scanning nonlinear dielectric microscopy (SNDM) is a near-field microwave microscopy technique used for dielectrics and semiconductors.
  • It is often combined with atomic force microscopy (AFM) for topography and force regulation.
  • Intermittent contact AFM with SNDM offers benefits for delicate samples but suffers from lower signal-to-noise (S/N) ratios.

Purpose of the Study:

  • To enhance the signal-to-noise ratio of SNDM combined with intermittent contact AFM.
  • To develop a theoretical framework for SNDM's S/N ratio.
  • To demonstrate the improved imaging capabilities for nanoscale electrical properties.

Main Methods:

  • Application of boxcar averaging for signal acquisition in SNDM with intermittent contact AFM.
  • Development of a theoretical model for the S/N ratio in SNDM.
  • Experimental validation using peak-force tapping AFM and atomically thin van der Waals semiconductors.

Main Results:

  • Demonstrated significant enhancement of the S/N ratio in SNDM using boxcar averaging with peak-force tapping AFM.
  • Successfully visualized carrier concentration distribution in few-layer Nb-doped MoS2, revealing an anomalous electron doping effect.
  • Confirmed the applicability of the method to other scanning microwave microscopes like scanning microwave impedance microscopy.

Conclusions:

  • Boxcar averaging effectively improves the S/N ratio for SNDM combined with intermittent contact AFM.
  • The enhanced technique allows for simultaneous nanoscale topographic, electrical, and mechanical imaging, even on sensitive samples.
  • This advancement opens new possibilities for characterizing advanced materials and devices.