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A Compact Optical MEMS Pressure Sensor Based on Fabry-Pérot Interference.

Yonghong Qi¹, Minghui Zhao¹, Bo Li¹

¹State Key Laboratory for Manufacturing Systems Engineering, Xi'an Jiaotong University, Xi'an 710049, China.

Sensors (Basel, Switzerland)

|March 10, 2022

Summary

This study introduces a compact optical Fabry-Pérot pressure sensor using MEMS technology for wind pressure monitoring on transmission towers. The developed sensor offers high accuracy and sensitivity, overcoming limitations of traditional fiber optic sensors.

Keywords:

Fabry–Pérot (FP)MEMS diaphragm pressure sensor

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Area of Science:

Optoelectronics
MEMS Technology
Sensor Development

Background:

Optical pressure sensors are ideal for transmission line towers due to anti-electromagnetic interference.
Traditional fiber optic sensors are unsuitable due to cost and bulkiness.
Wind pressure monitoring is crucial for transmission line tower integrity.

Purpose of the Study:

To develop a compact optical Fabry-Pérot pressure sensor for wind pressure measurement.
To utilize MEMS technology for fabricating a novel pressure sensing chip.
To evaluate the performance of the developed sensor for transmission line tower applications.

Main Methods:

Fabrication of a MEMS sensing chip with a Fabry-Pérot cavity and a square diaphragm using Silicon on Insulator (SOI) wafer.
Integration of the MEMS chip with a vertical-cavity surface-emitting laser (Vcsel) and a photodiode (PD).
Calibration and testing of the sensor using an experimental platform with a digital pressure gauge and loading machine.

Main Results:

The diaphragm sensitivity was measured at 117.5 nm/kPa.
The pressure sensor demonstrated a measurement range of 0-700 Pa and a sensitivity of 115 nA/kPa.
Achieved performance metrics include nonlinearity (1.48%FS), repeatability (2.23%FS), hysteresis (1.59%FS), and overall accuracy (3.12%FS).

Conclusions:

A compact optical Fabry-Pérot pressure sensor based on MEMS technology has been successfully developed.
The sensor exhibits excellent performance characteristics suitable for wind pressure monitoring on transmission line towers.
This MEMS-based sensor offers a promising alternative to existing bulky and expensive fiber optic solutions.