An ultra-stable MEMS resonator with ±14 ppb frequency stability realized by nonlinearity-mediated drift suppression

Area of Science:

• Microelectromechanical Systems (MEMS)
• Solid-State Physics
• Precision Engineering

Background:

• Silicon-based Microelectromechanical Systems (MEMS) resonators are key for precise timing but suffer from temperature-induced frequency instability.
• Existing oven-controlled MEMS resonators require design changes and lack post-fabrication flexibility.

Purpose of the Study:

• To develop a novel nonlinearity-mediated temperature compensation scheme for MEMS resonators.
• To improve the frequency stability of silicon-based resonant devices without altering fabrication processes.

Main Methods:

• Utilized the nonlinear amplitude-frequency dependence of a Duffing resonator.
• Implemented a two-stage compensation: initial oven control followed by nonlinearity-mediated active suppression of frequency drift.

Main Results:

• Achieved a frequency stability of ±14 ppb for the MEMS resonator.
• Demonstrated rapid and precise control over frequency stability against temperature variations.

Conclusions:

• The proposed nonlinearity-mediated compensation scheme effectively enhances MEMS resonator frequency stability.
• This approach offers post-fabrication flexibility and broadens engineering applications for silicon resonant devices.