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Updated: Aug 16, 2026
10:28
Compact Lens-less Digital Holographic Microscope for MEMS Inspection and Characterization
Published on: July 5, 2016
Concept and simulation of a MEMS cycloidal mass analyzer
Haobin Wang1,2, Han Wang3, Chen Shen1,2
1Hefei Institutes of Physical Science, Chinese Academy of Sciences, Hefei, 230031, PR China.
Microsystems & Nanoengineering
|August 14, 2026
Summary
This study miniaturizes cycloidal mass spectrometry using MEMS technology. Optimized designs achieve high resolution and efficiency for broad mass-to-charge ranges, advancing portable mass analysis.
Area of Science:
- Analytical Chemistry
- Microelectromechanical Systems (MEMS)
Background:
- Cycloidal mass spectrometry offers perfect-focusing properties.
- Miniaturization is key for developing portable analytical devices.
Purpose of the Study:
- Investigate the miniaturization of cycloidal mass spectrometry.
- Introduce a planar, stacked-layer MEMS-based cycloidal mass analyzer.
- Analyze design parameters affecting performance.
Main Methods:
- Comprehensive numerical analysis of electric sector and electrode geometry.
- Simulation of ion focusing and mass separation.
- Optimization of device dimensions and operating vacuum.
Main Results:
- Optimized geometry mitigates electric field distortion, improving ion beam focusing and resolution.
- Achieved FWHM of ~0.03 Da for light ions and ~0.40 Da for heavy ions.
- Maintained resolution >99 and detection efficiency >92% across m/z 2-50 Da.
Conclusions:
- The MEMS-based cycloidal mass analyzer demonstrates robust performance.
- Miniaturization pathway is viable for high-resolution mass analysis.
- Device shows potential for portable applications requiring precise mass separation.
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