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Thermally-modulated dissipation dilution in 2D NEMS resonators with explicit model and temperature-stable damping
Pengcheng Zhang1,2, Luming Wang3, Jiankai Zhu3,4
1Global College, Shanghai Jiao Tong University, Shanghai, China. zpengchen@ethz.ch.
Microsystems & Nanoengineering
|August 12, 2026
Summary
Strain-diluted dissipation modulates the quality (Q) factor in nanoelectromechanical systems (NEMS). Researchers developed a model to understand temperature effects, leading to thermally stable graphene-MoS2 resonators.
Area of Science:
- Materials Science
- Nanotechnology
- Physics
Background:
- Strain-diluted dissipation is a key technique for tuning the quality (Q) factor in resonant nanoelectromechanical systems (NEMS).
- Understanding and controlling temperature-dependent dissipation dilution in two-dimensional (2D) NEMS resonators remains a challenge.
Purpose of the Study:
- To investigate temperature-modulated dissipation dilution mechanisms in 2D NEMS resonators.
- To develop a predictive model for dissipation dilution under varying temperatures.
- To design and demonstrate a NEMS resonator with enhanced thermal stability.
Main Methods:
- Development of an explicit temperature-dependent dissipation dilution model.
- Experimental characterization of graphene and molybdenum disulfide (MoS2) resonators across a temperature range (77 K to 355 K).
- Design and fabrication of a graphene-MoS2 heterostructure resonator.
Main Results:
- The model accurately captures experimental observations of Q factor variations with temperature in graphene and MoS2 resonators.
- Graphene resonators showed a decrease then increase in Q factor, while MoS2 resonators exhibited a monotonic decrease.
- The designed graphene-MoS2 heterostructure demonstrated high temperature stability in frequency and Q factor.
Conclusions:
- The study advances the understanding of dissipation dilution mechanisms in 2D NEMS.
- The findings pave the way for developing thermally stable resonant transducers and logic components.
- Precise control over temperature effects is crucial for NEMS applications.
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