Related Experiment Video
Updated: Sep 30, 2025
09:12
Production of Single Tracks of Ti-6Al-4V by Directed Energy Deposition to Determine the Layer Thickness for Multilayer Deposition
Published on: March 13, 2018
9.4K
Additive Manufacturing in Atomic Layer Processing Mode
Ivan Kundrata1,2,3, Maïssa K S Barr2, Sarah Tymek2
1ATLANT 3D Nanosystems, Kongens Lyngby, 2800, Denmark.
Small Methods
|March 12, 2022
Summary
Atomic-layer additive manufacturing (ALAM) enables nanoscale 3D printing by combining additive manufacturing with atomic layer deposition. This new technique creates high-resolution material patterns for advanced applications.
Area of Science:
- Materials Science
- Nanotechnology
- Chemical Engineering
Background:
- Traditional additive manufacturing lacks nanoscale resolution.
- Atomic layer deposition (ALD) offers atomic-level precision coating.
- Combining these techniques could revolutionize micro- and nanoscale fabrication.
Purpose of the Study:
- To introduce and demonstrate Atomic-Layer Additive Manufacturing (ALAM).
- To achieve high-resolution material patterning for micro- and nanoscale engineering.
- To explore ALAM's potential for simplified, efficient manufacturing.
Main Methods:
- Spatially localized delivery of ALD precursors.
- Utilizing microfluidic gas delivery for lateral resolution control.
- Demonstrating ALAM on planar substrates and 3D nanostructures.
Main Results:
- Achieved vertical resolution of approximately 0.1 nm.
- Successfully patterned crystalline TiO2 and Pt lines and structures.
- Demonstrated conformal coatings on 3D nanostructures.
- Fabricated functional temperature sensors with industry-standard performance.
Conclusions:
- ALAM offers a simpler, more flexible alternative to lithographic microfabrication.
- This technique significantly reduces processing time, cost, material waste, and energy consumption.
- ALAM holds promise for a new family of atomic-layer advanced manufacturing techniques.
