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Integrated opto-mechanical cantilever sensor with a rib waveguide

Hongru Zhang1, Guofang Fan1, Shi Li2

  • 1Key Laboratory of All Optical Network and Advanced Telecommunication Network, Ministry of Education, Institute of Lightwave Technology, Beijing Jiaotong University, Beijing, China.

Journal of Microscopy
|March 15, 2022
PubMed

Keywords:
coupling efficiencyopto-mechanical cantilever sensorrib waveguidesensitivity

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