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Origination of free-form micro-optical elements using one- and two-photon grayscale laser lithography
Applied Optics
|March 17, 2022
Summary
We developed a laser direct-write process for creating micro-optical elements. This method enables mass fabrication of complex, free-form micro-optics with high structural quality for diverse applications.
Area of Science:
- Micro-optics fabrication
- Laser direct-write lithography
- Replication technologies
Background:
- Optical elements require precise surface structures for functionality.
- Mass fabrication of complex micro-optics is challenging.
- Origination masters are key for replication processes like roll-to-roll.
Purpose of the Study:
- To develop an origination process for planar free-form micro-optical elements.
- To enable mass fabrication using roll-to-roll technology.
- To achieve high-quality surface relief structures.
Main Methods:
- Development of a grayscale laser direct-write platform.
- Utilizing one- and two-photon absorption lithography.
- Fabrication of origination masters for micro-optical elements.
Main Results:
- Demonstrated excellent structural quality of micro-relief structures.
- Achieved variable structure heights (1-20 µm) and lateral sizes (>5 µm).
- Successfully designed and fabricated free-form micro-optical elements for light pattern projection.
Conclusions:
- The developed laser direct-write platform is effective for creating micro-optical element origination masters.
- The process enables high-fidelity replication for mass production.
- The fabricated micro-optics demonstrate functional light projection capabilities.
