Accuracy improvement of linear stages using on-machine geometric error measurement system and error transformation...

Area of Science:

• Metrology
• Mechanical Engineering
• Instrumentation

Background:

• Linear stages are crucial for precision positioning in various applications.
• Accurate geometric error measurement is essential for improving linear stage performance.
• Existing measurement systems can be complex and difficult to install.

Purpose of the Study:

• To propose a compact, portable, and easily installable six-degree-of-freedom (6DOF) geometric error measurement system.
• To enhance the resolution of roll error measurement using combined focus lenses.
• To establish an error transformation model for estimating positional errors at the functional point.

Main Methods:

• Development of a novel 6DOF geometric error measurement system.
• Innovative use of two mirrors as sensitive elements for roll error detection.
• Integration of combined focus lenses to improve roll error resolution.
• Application of Abbe and Bryan principles for an error transformation model.

Main Results:

• The designed system demonstrated capability in measuring geometric errors.
• The established error transformation model proved effective in estimating positional errors.
• The system offers improved accuracy for linear stages.

Conclusions:

• The proposed 6DOF system provides a compact and accurate solution for linear stage geometric error measurement.
• The innovative use of mirrors and combined focus lenses enhances roll error measurement.
• The validated error transformation model accurately estimates functional point errors from measurement point data.