Effect of Quadrature Control Mode on ZRO Drift of MEMS Gyroscope and Online Compensation Method

The quadrature coupling error is an important factor that affects the detection output of microelectromechanical system (MEMS) gyroscopes. In this study, two quadrature error control methods, quadrature force-to-rebalance control (Mode I) and quadrature stiffness control (Mode II) were analyzed. We obtained the main factors affecting the zero-rate output (ZRO) under force-to-rebalance (FTR) closed-loop detection. The analysis results showed that the circuit phase delay in Mode I caused the quadrature channel to leak into the in-phase channel. However, in Mode II, the quadrature coupling stiffness was corrected in real time, which effectively improved the stability of the ZRO. The changes in the vibration displacement and Q-factor were the main factors for the ZRO drift in Mode II. Therefore, we propose an online compensation method for ZRO drift based on multiparameter fusion. The experimental results on a cobweb-like disk resonator gyroscope (CDRG) with a 340 k Q-factor showed that the bias instability (BI) of Mode II was significantly better than that of Mode I. After online compensation, the BI reached 0.23°/h, and the bias repeatability reached 3.15°/h at room temperature.