Research Progress on Coating of Sensitive Materials for Micro-Hotplate Gas Sensor

Zhenyu Yuan1,2,3,4, Fan Yang1, Fanli Meng1,2,3,4

  • 1College of Information Science and Engineering, Northeastern University, Shenyang 110819, China.

Micromachines
|March 26, 2022
PubMed
Summary

Micro-hotplate gas sensors offer fast, reliable detection for air quality and health monitoring. Optimizing the assembly of gas-sensitive materials on micro-hotplates enhances sensor performance and selectivity.