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Updated: Sep 28, 2025

Fabrication and Characterization of High-Q Silicon Nitride Membrane Resonators
Published on: August 8, 2025
Raman scattering enhancement of dielectric microspheres on silicon nitride film
1Health and Medical Research Institute, National Institute of Advanced Industrial Science and Technology (AIST), Central 6, Higashi 1-1-1, Tsukuba, Ibaraki, 305-8566, Japan. t-ogura@aist.go.jp.
Abstract:
Circulating light in the total internal reflection within dielectric spheres or disks is called the whispering gallery mode (WGM), which by itself is highly sensitive to its surface and capable of detecting viruses and single atomic ions. The detection site of the sensors using WGM is created by the evanescent light from the circulating light inside spheres. Here we report anomalous Raman scattering enhancement in dielectric microspheres on a silicon nitride (SiN) film. This Raman enhancement occurs at the periphery of the spheres, and a similar ring of light was also observed under a fluorescence microscope. This is caused by the light circulating around the dielectric spheres as in the WGM. We observed anomalously enhanced Raman spectrum at the periphery of 3 μm diameter polystyrene (PS) microspheres on a SiN film using confocal laser Raman microscopy. The wavelength intensity of this enhanced Raman spectrum was accompanied by periodic changes due to interference. These features may lead to the development of high-sensitive sensors and optical devices.
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