Surface Engineering on Polyimide-Silver Films in Low-Cost, Flexible Humidity Sensors

In this work, surface engineering is applied to polyimide (PI) films to fabricate low-cost Ag/PI wireless humidity sensors with a resonant frequency of 2.45 GHz. The sensors were obtained by in situ metallization technique coupled with inkjet printing, where PI plays triple roles as a flexible substrate, ion-exchange surface, and sensing material to moisture. Moreover, the humidity sensitivity can be enhanced by the improvement of hydrophilicity via loading with different ions on the PI surface, which has been demonstrated by Fourier transform infrared (FTIR), X-ray photoelectron spectroscopy (XPS), and contact angle measurements. The wireless humidity sensor loaded with K⁺ ions has the maximum sensitivity of 97.7 kHz/% RH at a low relative humidity range of 20-65% and 359.7 kHz/% RH at a high relative humidity of 65-90%, respectively. Accordingly, a sensing mechanism of the fabricated humidity sensor has been discussed in detail. On the other hand, the characteristics of the humidity sensor such as response and recovery speed and stability are analyzed. The mechanical performance tests show that the humidity sensor displays excellent flexibility and good mechanical stability. A strong adhesion between the Ag antenna and PI substrate can be found as well. The passive wireless humidity sensor described in this work has the advantages of having a simple structure, low cost, high sensitivity, long-term stability, and good mechanical properties, which has potential applications in automated industry and healthcare with real-time humidity monitoring.